Abstract

Abstract: In 2O3 doped In2O3:MoO3 binary oxide thinfilms were prepared by using spray pyrolysis technique on glass substrate forvarious concentrations at 4000C temperature. The effect of In2O3 On structural,morphological and electrical properties has been studied. Thin films werecharacterized using X-ray diffraction (XRD), SEM and Electrical properties. Theobtained film shows good crystalline in nature. The average grain sizeestimated is 11 nm the other properties were under consideration thesensitivity and selectivity of sensor can be improved by dopants or additiveswhich can change the gas sensing characteristics. Nano composite term containsmixture of two or more nano oxide materials like binary oxide. Nano compositefilms consists of Nano crystalline or amorphous phase of a least two differentmaterials In2O3 as dopant and MoO3 as a functional material in film. Theprecursor InCl3 and MoCl5 of concentrations 0.2N:0.1N.

Keywords:XRD , SEM EDS, Electrical, Gas sensor,spray pyrolysis technique , binary oxide thin films,In2O3 , MoO3,Thin film.